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1 article(s) from Solov’yov, Andrey V

Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF₃)₄

Alexey Prosvetov,
Alexey V. Verkhovtsev,
Gennady Sushko and
Andrey V. Solov’yov

Beilstein J. Nanotechnol. 2021, 12, 1151–1172, doi:10.3762/bjnano.12.86

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Figure 1: Atomistic IDMD-based simulation protocol of the FEBID process by means of MBN Explorer [19] and MBN Stu...

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Figure 2: Side view of an optimized single Pt(PF₃)₄ molecule adsorbed on a SiO₂-H substrate. The energy minim...

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Figure 3: (A) Total electron impact fragmentation cross section of Pt(PF₃)₄ including DEA and DI contribution...

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Figure 4: A snapshot of the multiscale IDMD simulation of a FEBID process using Pt(PF₃)₄ at the end of the 20...

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Figure 5: The number of Pt atoms (full spheres) and the total number of atoms including ligands (open spheres...

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Figure 6: A snapshot of the IDMD simulation of the FEBID process of Pt(PF₃)₄ in the regime of E_dep = 300 kcal...

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Figure 7: Evolution of the largest cluster in the course of simulation at the end of each FEBID simulation cy...

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Figure 8: (A) Size distribution of Pt clusters during the first seven FEBID cycles. (B) Difference of size di...

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Figure 9: Double-log plot of the number of Pt atoms N in the deposited clusters as function of the radius R o...

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Figure 10: Distribution of the circumvented diameters d of the deposited Pt clusters after several cycles of t...

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Figure 11: (A) The atomic content of the deposited nanostructure is analyzed by splitting the nanostructure in...

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Figure 12: Evolution of the height of the grown Pt-containing structure at different FEBID simulation cycles f...

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Full Research Paper

Published 13 Oct 2021

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Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF3)4

Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF₃)₄